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UX6B BiCMOS


As a leader in advanced process technologies, NEC Electronics offers the first silicon-based BiCMOS process on a 90-nanometer (nm) CMOS platform. This silicon-based technology offers several advantages.


  • Low cost
  • Best-in-class performance
  • Proven manufacturability

Applications

The NEC Electronics BiCMOS process is targeted to a range of analog and mixed-signal applications that require frequencies up to 10 GHz (ft = 40 GHz).


  • HDD and DVD preamplifiers
  • IC testers
  • Power management ICs
  • Others

Cost Advantage of Silicon-based BiCMOS Process

Cost is often a concern for BiCMOS manufacturing processes. However NEC Electronics' silicon-based BiCMOS process costs only about 10% more than standard CMOS platforms, due to a patented epi-less structure that requires only four additional mask layers.

Although lower in cost, NEC Electronics' silicon-based BiCMOS process offers all of the advantages of high-voltage/high-performance bipolar and low-power CMOS, giving analog and mixed-signal circuit designers a cost-effective balance between output current and power consumption.


Structural advantages for performance enhancement

SEM cross section of NEC Electronics NPN bipolar transistor
Figure 1. SEM cross section of NEC Electronics NPN bipolar transistor

With a low-collector resistance structure, UX6B technology offers best-in-class silicon-based bipolar junction transistor (BJT) performance. One structural advantage of UX6B technology is the utilization of silicide on the transistor base. The silicided ring-shaped base leads to very low base resistance (Rb), and hence very low noise. Another structural advantage of NEC Electronics' BiCMOS transistors is a deeper collector sink design. The deeper sink (shown in figure 1) shortens the distance from the bottom of the collector sink to the emitter of the transistor. The shorter distance results in lower resistance and greater performance.

With BiCMOS technology, analog circuit designers can take advantage of much improved relative accuracy compared to standard CMOS technology. Base-emitter-voltage (Vbe) matching is an order of magnitude smaller than the threshold-voltage (VT) matching of CMOS transistors.

Additionally, with NEC Electronics' BiCMOS process, bipolar element characteristics can be controlled without affecting the CMOS characteristics.

IEEE members can read more about the structural advances NEC Electronics introduced in the BiCMOS 0.15µm generation by downloading this technical paper – "A 0.15-µm/73-GHz fmax RF BiCMOS technology using cobalt silicide ring extrinsic-base structure" – from the VLSI Technology Digest.


History of versatility and manufacturability

NEC Electronics offers a wide range of silicon technology platforms, along with a successful record of combining multiple technologies on one chip. As the first to incorporate a BJT onto a 90 nm CMOS platform, NEC Electronics continues to expand its process lineup with the latest UX6B BiCMOS technology. Preceding 90 nm UX6B, NEC Electronics' BiCMOS roadmap includes 0.18µm (UB3), 0.25µm (UB2), and 0.35µm (QB2) process nodes.


UX6B Standard UX6B Low Power UX6B High Voltage
Gain (β) 70 70 70
VAF 40V 28V 55V
BVceo 4.4V 3.8V 7.0V
Ceb/Ccb1 2.9 fF/2.0 fF 2.9 fF/2.2 fF 2.9 fF/1.6 fF
Rb/Rc2 70Ω/82Ω 90Ω/82Ω 70Ω/82Ω
FT 30 GHz 40 GHz 22 GHz
Fmax2 40 GHz 47 GHz 30 GHz

Notes:
1: 0.24x1
2: 0.24x8

To further extend the versatility of NEC Electronics' technologies, the UX6B BiCMOS process is offered at three performance levels - from high voltage to low power - allowing you to balance speed with power.