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Press Release
*****For immediate use July 11, 2001 NEC Develops Evolutionary Multi-feature Process Company Announces its Next-Generation 0.10-micron System LSI UX6 Process![]() "Next-Generation 0.10-micron System LSI UX6 Process" TOKYO July 11, 2001 - NEC Corporation and its semiconductor affiliates in the United States, NEC Electronics Inc., today announced they have completed development of a 0.10-micron (Lgate = 65 nm, VDD = 1.0 V) basic process module for driving next-generation digital consumer electronics, mobile telephones, trunk transmission equipment and Internet servers. The UX6 process technology provides 1.0-volt (V) transistor operation and super-fine 65 nm gates to meet the broad spectrum of requirements from ultra-high performance to low power consumption. With UX6, NEC has adopted a newly developed silicon oxy-nitride film formation process to avoid negative effects on power consumption and reliability caused by the leakage current from thinner gate dielectric film, achieving a nearly double-figure decrease in the gate leakage current of its high-speed transistors. At the same time, further optimizing the gate dielectric film has made it possible to increase the speed of its low gate leakage transistors. NEC has also employed a low-k inter-metal dielectric film (k<2.4) using a new material to lower the capacitance between the wires and push clock speeds above 1 gigahertz (GHz). NEC offers four core transistor types (ultra-high speed, high speed, standard
and low leakage current) to enable sophisticated speed and power management over
a wide range of applications. The ultra-high-speed and high-speed transistors
provide top-level performance; standard transistors offer IP tailoring to suit
customers' needs; and low leakage transistors employ triple-oxide technology to
minimize the leakage current. NEC and TSMC (Taiwan Semiconductor Manufacturing Company, Ltd.) have jointly set the common target for the 0.1um-generation design rules, high-speed and standard transistor characteristics giving customers immediate access to IP cores proven at both companies. Through this arrangement NEC also hopes to accelerate the circulation and standardization of IP cores, which is essential for System LSI design and improve its future foundry efficiency with TSMC. NEC aims to start receiving orders for the system LSI design base CB-100, a UX6 platform that integrates signal integrity support, high-speed wide-band and low-power-consumption technologies, beginning in the first quarter of 2003.
NEC Electronics Inc. is either a registered trademark or trademark of NEC Corporation
in the United States and/or other countries. All other registered trademarks or
trademarks are property of their respective owners. ***
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