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Prevention of Global Warming
Promoting efficient use of energy and substitution of greenhouse gases
NEC Electronics Corporation promotes in-house reductions of CO2 emissions through rationalization of energy use at our factories and offices (e.g., development and implementation of energy-saving equipment, improvement and rationalization of manufacturing processes) reduction in emissions of PFCs(Note1) and other greenhouse gases used in the manufacturing process (e.g., use of substitute gases, development of removal and recovery technologies).
Efficient use of energy at factory
- Co-generation/Ice heat-exchange system
- Use of FFU(fan filter unit) air conditioning system
- Use of localized clean chambers
- Control of energy supply when idling
The NEC Electronics Group is currently working to reduce the amount of energy it consumes in Japan to 72% or less of the fiscal 1991 level in terms of real production units by fiscal 2011. However, under the present circumstances, it will be difficult for the company to attain this target through these efforts alone. Accordingly, we are also making further efforts to eliminate the wasteful use of energy while making a complete review of the manufacturing process, as well as working closely with the production facilities industry and the incidental facilities industry.
Greenhouse gas emission reduction strategies
- Switch to gases, cleaning fluids, and coolants with lower global warming coefficients
- Reduce greenhouse gas consumption (optimize processing conditions)
- Decompose or chemically convert greenhouse gases to lower-impact gases
PFC gas is used in the semiconductor manufacturing process for cleaning devices. Reducing emissions of this gas is an urgent issue, however, given its long atmospheric life and high global warming potential, some 10,000 times that of CO2. In view of these circumstances, we aim to reduce our PFC gas emissions such that by 2010, the emission level is no more than 90% the 1995 level. Furthermore, we are stepping up our emissions reduction efforts by optimization of gas usage conditions, implementation of substitute gases, installation of extraction facilities and development of emissions reduction technologies.
Note
- Perfluorocarbon: A greenhouse gas determined to be subject to emissions reductions at the COP3 in December 1997
